MEMS / Nano / Material Technologies

RESEARCH INTERESTS
- Actuators and SensorsCHEN Shih-Chi, LIAO Wei-Hsin
- Lab-on-a-chipZHANG Li
- MEMS/NEMSZHANG Li
- Micro-and NanofabricationZHANG Li, ZI Yunlong
- Micro-and Nano-positioningLIAO Wei-Hsin
- Micro-opto-electro-mechanical Systems (MOEMS)CHEN Shih-Chi
- Modeling and Control of Nano-and Micro-systemsYUAN Haidong
- Multifunctional CompositesLIAO Wei-Hsin, ZHANG Weizhao
- NanomechanicsZHANG Li, ZI Yunlong
- Nanoscale Heat TransferXU Dongyan
- Smart Materials and StructuresLIAO Wei-Hsin
- Quantum SensorsYUAN Haidong
- Soft LithographyCHEN Shih-Chi
- Thin Film TechnologyZHANG Li